[14p-F206-1~13] 22.1 合同セッションM 「フォノンエンジニアリング」

[14p-F206-9] ナノ構造化による多結晶シリコン薄膜熱電変換素子の高出力化の検討

〇柳澤 亮人¹、Zimmermann Peter¹、辻井 直人²、Paul Oliver³、森 孝雄²、野村 政宏^1,4,5 (1.東大生研、2.物材機構、3.フライブルク大 IMTEK、4.東大ナノ量子機構、5.JSTさきがけ)

キーワード：熱電変換、フォノニック結晶、エナジーハーベスト

We investigate the performance of silicon thermoelectric device with phononic crystal nano structures. Since it is showed that nano-structuring silicon thin film can improve the thermoelectric figure of merit by more than a factor two, Si thermoelectric energy harvesters attract a lot of attention. In this work, we simulated thin film based Si thermoelectric devices by using a finite element method. We investigated the optimal thickness and length of TE elements, and we found that PnC patterning can improve the TE device performance and also allow for a higher density of TE pairs, leading to an increase in output power and mechanical stabillity sufficient for energy harvesting applications.