[14p-P1-1~25] 8 Plasma Electronics（Poster）

[14p-P1-12] Effects of Si thin film by inductively coupled plasma-assisted sputtering

〇(M1)Dongju Shim¹, Yuki Ishii¹, Tetsuya Kaneko¹, Hiroshi Kuwahata¹, Kunio Okimura¹, Haruo Shindo², Masao Isomura¹ (1.Tokai Univ, 2.Plasma Science and Engineering Inst)

Keywords:Hydrogenated amorphous silicon, Inductively Coupled Plasma