[14p-P1-1~25] 8 Plasma Electronics（Poster）

[14p-P1-15] Film formation of diamond-like carbon using high power impulse magnetron sputtering

〇Atsushi Ishikawa¹, Takayuki Ohta¹, Akinori Oda², Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba inst. Tech., 3.Gifu Univ.)

Keywords:high power impulse magnetron sputtering, DLC