Alkali Metal Adsorption Property on Si Surface Treated with Ar/O<sub>2</sub> Gas Plasma

Presentation information

Poster presentation

8 Plasma Electronics » 8 Plasma Electronics（Poster）

Tue. Mar 14, 2017 1:30 PM - 3:30 PM P1 (BP)

1:30 PM - 3:30 PM

〇Jumpei Suzuki¹, Akihisa Ogino¹ (1.Shizuoka Univ.)

Keywords:Microwave plasma, Alkali metal, Photon enhanced thermionic emission