[14p-P1-1~25] 8 Plasma Electronics（Poster）

[14p-P1-25] Deposition of Aluminum Nitride Thin Films with Plasma Enhanced Reactive DC Magnetron Sputter Deposition

〇Kosuke Takenaka¹, Yoshikatsu Satake¹, Giichiro Uchida¹, Yuichi Setsuhara¹ (1.Osaka Univ.)

Keywords:Reactive DC Pulsed Magnetron Sputtering