[14p-P3-1~19] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

△ [14p-P3-19] A Measurement-System using Vehicle-Control for Inertial Sensors

〇(M2)Toshiaki Gonda^1,4, Motohiro Takayasu^1,4, Daisuke Yamane^1,4, Hiroyuki Ito^1,4, Toshifumi Konishi², Shiro Dosho^1,4, Noboru Ishihara^1,4, Hiroshi Toshiyoshi^3,4, Katsuyuki Machida^1,2,4, Kazuya Masu^1,4 (1.Tokyo Tech., 2.NTT-AT, 3.The Univ. of Tokyo, 4.JST-CREST)

Keywords:Inertial Sensor, Vehicle Control, Measurement System