[15a-318-1~11] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[15a-318-10] High-Diffraction-Efficiency Wide-Acceptance-Angle Laminar-Type Diffraction Gratings for Boron -K Emission Spectroscopic Measurements

〇Masato Koike¹, Alexander Pirozhkov¹, Tadashi Hatano², Nishihara Hiroaki³, Sasai Hiroyuki³, Nagano Tetsuya³ (1.QuBS, National Inst.for Quantum and Radiological Sci. and Tech., 2.IMRM, Tohoku Univ., 3.Device Dept., Shimadzu Corp.)

Keywords:soft X-ray, diffraction grating, multilayer

In the development of steel materials such as super-high-tensile steel and the development of new medical technologies such as BNCT, accurate measurement of boron (B) at several ppm level and further clarification of interaction with other elements are also required. Recently, the authors found that diffraction efficiency can be improved by adding a thin film such as DLC to the metal surface on soft X - ray diffraction grating used for B - K emission spectroscopy. In this report, we also show that using the La type film increases the diffraction efficiency and increases the received light flux.