[15a-318-1~11] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[15a-318-8] Development of high spatial resolution X-ray phase-imaging microscope using laboratory source

〇Hidekazu Takano^1,2, Yanlin Wu^1,2, Atsushi Momose^1,2 (1.IMRAM, Tohoku Univ., 2.JST-ERATO)

Keywords:X-ray microscopy, X-ray interferometer, X-ray grating

We developed high spatial resolution phase-imaging X-ray microscope in laboratory scale by combining Lau interferometer, which consists of two diffraction gratings, into a full-field X-ray imaging microscope using a rotating anode. We realized quantitative phase measurement with spatial resolution of better than 100 nm by using 8.04 keV X-rays.