The 64th JSAP Spring Meeting, 2017

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15a-412-1~10] 6.2 Carbon-based thin films

Wed. Mar 15, 2017 9:00 AM - 11:45 AM 412 (412)

Hideaki Yamada(AIST), Tsuyoshi Yoshitake(Kyushu Univ.)

10:30 AM - 10:45 AM

[15a-412-6] Development of diamond nucleation equipment using micro discharge device

Hiroaki Murayama1, Hideyuki Kodama1, Fujii Daiki2, Kim Seongwoo2, Aida Hideo2, Suzuki Kazuhiro3, Sawabe Atsuhito1 (1.Aoyama Gakuin University, 2.Namiki Precision Jewel, 3.TOPLAS Engineering)

Keywords:Diamond, micro discharge device, diamond nucleation