[15a-419-1~10] 6.3 Oxide electronics

[15a-419-1] Growth of ZnO nanorods on Al-doped ZnO seed layer

Toshiki Kokubun¹, Albertus Bramantyo², Masayuki Okuya³, 〇Kenji Murakami³ (1.Shizuoka Univ., 2.GSST Shizuoka Univ., 3.GSIST Shizuoka Univ.)

Keywords:ZnO nanorods array, chemical bath deposition method, Al-doping

Vertically aligned ZnO nanorods array has been formed on the ZnO seed layer by using the chemical bath deposition (CBD) method. We have investigated effect of Al doping to the seed layer on the growth of ZnO nanorods array.