[15a-423-1~9] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[15a-423-4] Improvement of Assembly between Ultrasonic Horn and Mold by Cooling-fit with Multiple Dovetail Structures

〇Harutaka Mekaru¹, Takayuki Yano² (1.AIST, 2.IMS)

Keywords:ultrasonic nanoimprint, cooling fit, dovetail structures

For a long-time technical problem in ultrasonic nanoimprinting, the method of fixing a mold to an ultrasonic horn is expected to be solved by cooling-fit using dovetail structures. A plurality of dovetail structures were arranged so that edges of a joint surface between the ultrasonic horn and mold do not hit together when ultrasonic vibration is applied and further considering a contraction of the whole mold during cooling, it was designed to remove physical interference parts. As a result, an effect of improving a vibration distribution in the joint surface was confirmed.