[15p-311-1~18] 6.4 Thin films and New materials

△ [15p-311-10] Influence of template patterns on the self-assembled nanostructures of oxide thin films toward oxide DSA

〇Geng Tan¹, MingYu Li¹, Osamu Nakagawara², Azusa Hattori¹, Hidekazu Tanaka¹ (1.ISIR, Osaka Univ., 2.Murata Manufacturing Co., Ltd.)

Keywords:Self-assembled nanostructures, Composite oxide thin films, Directed self-assembly

Self-assembled nanocomposite thin films with vertical pillars and matrix structure have been well studied for the novel potential functionalities owing to their architecture, induced vertical interfacial strain and tunable physical properties. In particular, it is very difficult for the conventional lithography techniques to fabricate nanostructures with such small size and high density. However the conventional nanocomposite synthesis of these materials emerges randomly positioned nanopillars and matrix structures. It is very required for the precise control of nanostructures toward the application such as memory devices. On the other hand, for the self-assembled block copolymer, it has been demonstrated that the nanostructures could be arranged by the artificial patterns on substrates. This is called directed self-assembly (DSA) in the research field of block copolymer. In this work, we demonstrated the influence of template patterns on the self-assembled nanostructures of oxide thin films toward oxide DSA. This study may lead to future innovations and development of nanotechnology.