[15p-311-1~18] 6.4 Thin films and New materials

△ [15p-311-9] In Situ Temperature Measurement of Crystallization Process of Tin Oxide Films in ELAMOD Process at Nano Second Time Scale

〇Tsukasa Katsuki¹, Tetsuo Tsuchiya², Jun Akedo², Atsushi Yumoto¹, Kentaro Shinoda² (1.Shibaura Inst. Tech., 2.AIST)

Keywords:oxide, chemical solution deposition, excimer laser

The excimer laser-assisted metal-organic deposition (ELAMOD) process is an attractive method to produce oxide films through excimer laser irradiation at low temperature. A photothermal effect has been considered an important factor for crystal growth, but the growth mechanism is yet to be elucidated quantitatively. Therefore, in this study, we have developed an in situ method for monitoring a temperature field to evaluate a photothermal effect quantitatively.