Tsukasa Katsuki

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:15 PM - 6:15 PM 311 (311)

Oral presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[15p-311-1~18] 6.4 Thin films and New materials

3:30 PM - 3:45 PM

△ [15p-311-9] In Situ Temperature Measurement of Crystallization Process of Tin Oxide Films in ELAMOD Process at Nano Second Time Scale

〇Tsukasa Katsuki¹, Tetsuo Tsuchiya², Jun Akedo², Atsushi Yumoto¹, Kentaro Shinoda² (1.Shibaura Inst. Tech., 2.AIST)