The 64th JSAP Spring Meeting, 2017

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13 Semiconductors » 13.8 Compound and power electron devices and process technology

[15p-315-1~17] 13.8 Compound and power electron devices and process technology

Wed. Mar 15, 2017 1:15 PM - 5:45 PM 315 (315)

Naoteru Shigekawa(Osaka City Univ.), Hiroshi Okada(Toyohashi Univ. of Tech.)

1:15 PM - 1:30 PM

[15p-315-1] GaN Surface Oxidation by Remote Oxygen Plasma

〇Taishi Yamamoto1,2, Noriyuki Taoka2, Akio Ohta1, Nguyen Truyen1,2, Hisashi Yamamda2, Tokio Takahashi2, Mitsuhisa Ikeda1, Katsunori Makihara1, Mitsuaki Shimizu2, Seiichi Miyazaki1 (1.Nagoya Univ., 2.AIST GaN-OIL)

Keywords:GaN, Remote Oxygen Plasma