Taishi Yamamoto

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:15 PM - 5:45 PM 315 (315)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[15p-315-1~17] 13.8 Compound and power electron devices and process technology

1:15 PM - 1:30 PM

[15p-315-1] GaN Surface Oxidation by Remote Oxygen Plasma

〇Taishi Yamamoto^1,2, Noriyuki Taoka², Akio Ohta¹, Nguyen Truyen^1,2, Hisashi Yamamda², Tokio Takahashi², Mitsuhisa Ikeda¹, Katsunori Makihara¹, Mitsuaki Shimizu², Seiichi Miyazaki¹ (1.Nagoya Univ., 2.AIST GaN-OIL)

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