[15p-315-1~17] 13.8 Compound and power electron devices and process technology

[15p-315-1] GaN Surface Oxidation by Remote Oxygen Plasma

〇Taishi Yamamoto^1,2, Noriyuki Taoka², Akio Ohta¹, Nguyen Truyen^1,2, Hisashi Yamamda², Tokio Takahashi², Mitsuhisa Ikeda¹, Katsunori Makihara¹, Mitsuaki Shimizu², Seiichi Miyazaki¹ (1.Nagoya Univ., 2.AIST GaN-OIL)

Keywords:GaN, Remote Oxygen Plasma