The 64th JSAP Spring Meeting, 2017

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13 Semiconductors » 13.8 Compound and power electron devices and process technology

[15p-315-1~17] 13.8 Compound and power electron devices and process technology

Wed. Mar 15, 2017 1:15 PM - 5:45 PM 315 (315)

Naoteru Shigekawa(Osaka City Univ.), Hiroshi Okada(Toyohashi Univ. of Tech.)

2:00 PM - 2:15 PM

[15p-315-4] Understanding of Frequency Dispersion in C-V Curves of GaN MOS Capacitor

〇Noriyuki Taoka1, Toshiharu Kubo2, Toshikazu Yamada1, Takashi Egawa2, Mitsuaki Shimizu1 (1.AIST, 2.Nagoya Inst. Tech)

Keywords:GaN, frequency dispersion, surface potential fluctuation