[15p-412-1~18] 6.2 Carbon-based thin films

[15p-412-2] Analyses of Energy Band Structure and Electron Affinity of Electroconductive DLC Films

〇Haruhisa Kinoshita¹, Yoku Murayama¹, Ken Matsumoto¹ (1.Shizuoka Univ.)

Keywords:supermagnetron plasma, DLC, electron affinity

a-CNx:H (Electroconductive DLC) films are hard and are easy to electron emission from their surface, and are frequently used to the field electron emitter devices. Its electron emission mechanism are not known well, and its physical model is not shown clearly even recently. In this study, we fabricated FN tunneling device with thin SiO₂ film on DLC film. Using it, we measured its I-V characteristic, and successfully analyzed its energy band structure and electron affinity (2.6 eV).