[15p-F204-1~19] 15.6 Group IV Compound Semiconductors (SiC)

[15p-F204-10] Measurements of carrier distribution in SiC PiN diodes by using optical transmission

〇Masashi Kato¹, Shin-ichi Mae¹, Yoshiyuki Yonezawa², Tomohisa Kato² (1.NITech, 2.AIST)

Keywords:silicon carbide, PIN diode, carrier distribution

We measured carrier distribution in SiC PIN diodes with off- or on-state by using optical transmission of laser light with cross sectional scan.