[15p-F204-1~19] 15.6 Group IV Compound Semiconductors (SiC)

[15p-F204-7] Observation of Doped Region in Laser Al Doping of 4H-SiC

〇Akihiro Ikeda¹, Rikuho Sumina¹, Ryota Tsutsui¹, Hiroshi Ikenoue¹, Tanemasa Asano¹ (1.Kyushu Univ.)

Keywords:Laser doping