[15p-P11-1~11] 7 Beam Technology and Nanofabrication（Poster）

[15p-P11-5] Silicide nanocrystal formation in Mg ion implanted Si

〇(M2)Yuki Kobayashi¹, Muneyuki Naito², Cyril Bachelet³, Jerome Bourcois³ (1.Graduate School of Science and Technology, Konan Univ., 2.Department of Chemistry, Konan Univ., 3.Centre de Sciences Nucleaires et de Sciences de la Matiere)

Keywords:ion implantation