[15p-P11-1~11] 7 Beam Technology and Nanofabrication（Poster）

[15p-P11-6] Development of surface analysis method using cluster ion beam induced luminescence

〇Masaki Yamaoka¹, Ryuto Hiromichi¹, Francesco Musumeci², Takeuchi Mitsuaki¹ (1.hotonics and Electronics Science and Engineering Center, Kyoto Univ., 2.Dept. of Phys. and Astr., Catania Univ)

Keywords:cluster