[15p-P11-1~11] 7 Beam Technology and Nanofabrication（Poster）

[15p-P11-9] Observation of Secondary Electron Image for Multilayer Ceramic Capacitors with Applied Several Voltages using Helium Ion Microscope

〇Chikako Sakai¹, Nobuyuki Ishida¹, Shoko Nagano¹, Yoichiro Ogata², Daisuke Fujita¹ (1.NIMS, 2.TAIYO YUDEN CO., LTD.)

Keywords:Helium Ion Microscope, Multilayer Ceramic Capacitors, electrical potential distribution

We have introduced the applying voltage mechanism which has two probes into helium ion microscope equipment. We used inorganic solid multilayer ceramic capacitors (MLCCs) with BaTiO₃ dielectric and Ni internal electrodes as a specimen. The secondary electron (SE) images of the cross-sectional surface of the MLCCs were observed when various voltages were applied to the internal electrodes. In the dielectric region, the gray-scale value decreased from the grounded to the positively biased internal electrode linearly when the applied voltage is less or equal 1 V. The SE intensity on both sides of the grounded internal electrode was emphasized when the applied voltage is over 1.5 V since these areas were negatively charged. In the future, it is expected that this method can be applied to observe the electrical potential distribution of several devices with nanoscale high spatial resolution.