[15p-P13-1~11] 13.2 Exploratory Materials, Physical Properties, Devices

[15p-P13-7] Synthesis of Si-based nanosheet bundles by NH4Cl treatment using CaSi₂ as a template

〇Yuya Saito¹, Kenta Sasaki¹, Yuki Kumazawa¹, Nanae Atsumi², Keita Hikichi², Peiling Yuan³, Hirokazu Tatsuoka¹ (1.Grad. Sch. Integr. Sci. & Technol., Dept. Eng.,Shizuoka Univ., 2.Fac.Eng.,Shizuoka Univ., 3.Grad. Sch. Sci. & Technol.,Shizuoka Univ.)

Keywords:semiconductor, nanosheet, calcium disilicide