[15p-P8-1~10] 15.7 Crystal evaluation, impurities and crystal defects

[15p-P8-5] Density functional theory study on formation energy and diffusion path of metal atom near B in Si crystals

〇(M2)atsuhiro yamada¹, sueoka koji² (1.Graduate school of Okayama Pref. Univ., 2.Okayama Pref. Univ.)

Keywords:Gettering, Epitaxial wafer, Diffusion barrier