The 64th JSAP Spring Meeting, 2017

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

[16a-413-1~12] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

Thu. Mar 16, 2017 9:00 AM - 12:15 PM 413 (413)

Takanobu Watanabe(Waseda Univ.), Kiyoteru Kobayashi(Tokai Univ.)

11:30 AM - 11:45 AM

[16a-413-10] Evaluation of Electron Affinity of HfO2 and Interfacial Dipole from XPS Analysis

Nobuyuki Fujimura1, Akio Ohta1, Mitsuhisa Ikeda1, Katsunori Makihara1, Seiichi Miyazaki1 (1.Nagoya Univ.)

Keywords:XPS, Electrical Dipole