11:15 AM - 11:30 AM
△ [16a-424-5] Determination of crystal orientation dependence of the sputtering yield using polycrystalline metals (2)
Keywords:sputtering yield, crystal orientation, EBSD
Oral presentation
CS Code-sharing session » CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication
Thu. Mar 16, 2017 10:00 AM - 12:00 PM 424 (424)
Masahito Tagawa(Kobe Univ.), Hiroshi Tsuji(Kyoto Univ.)
11:15 AM - 11:30 AM
Keywords:sputtering yield, crystal orientation, EBSD