11:30 AM - 11:45 AM
[16a-424-6] Investigation of surface activation bonding by Gas cluster ion beam irradiation
Keywords:surface activated bonding, Gas cluster ion beam
Presentation information
Oral presentation
CS Code-sharing session » CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication
[16a-424-1~7] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication
Thu. Mar 16, 2017 10:00 AM - 12:00 PM 424 (424)
Masahito Tagawa(Kobe Univ.), Hiroshi Tsuji(Kyoto Univ.)