[16a-512-1~8] 薄膜・多層膜の界面イメージング

▲ [16a-512-6] Visualization of buried interfaces by X-ray reflectivity imaging

〇Jiang Jinxing^1,2、Sakurai Kenji^2,1 (1.Univ. of Tsukuba、2.Nat. Inst. for Mat. Sci.)

キーワード：buried interfaces, X-ray reflectivity imaging, image reconstruction

The unique molecular and atomic features of the buried interfaces play vital roles in various systems as diverse as the electrochemical processes, the adhesive strength, the corrosion of a structural metal, and so on. Visualization of those buried interfaces is of great importance, thus imaging capabilities are essential for modern interfaces characterizations. Based on image reconstruction scheme and X-ray reflectivity technique, we have successfully visualized hetero structures in buried interfaces by our original non-contact X-ray reflectivity (XRI) imaging system.