The 64th JSAP Spring Meeting, 2017

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Oral presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[16a-B5-1~11] 13.2 Exploratory Materials, Physical Properties, Devices

Thu. Mar 16, 2017 9:00 AM - 12:00 PM B5 (B5)

Haruhiko Udono(Ibaraki Univ.), Hirokazu Tatsuoka(Shizuoka Univ.)

11:45 AM - 12:00 PM

[16a-B5-11] Reduction of Contact Resistance of a-Si/BaSi2 Deposited by Vacuum Evaporation

Takamichi Suhara1, 〇Yoshihiko Nakagawa1, Kosuke O. Hara2, Yasuyoshi Kurokawa1, Takashi Suemasu3, Noritaka Usami1 (1.Nagoya Univ., 2.Univ. of Yamanashi, 3.Univ. of Tsukuba)

Keywords:BaSi2, Contact Resistance