Influence of Surface Treatment for SiO<sub>2</sub>/n-GaN Interfaces before Deposition

Presentation information

Poster presentation

13 Semiconductors » 13.8 Compound and power electron devices and process technology

Thu. Mar 16, 2017 9:30 AM - 11:30 AM P4 (BP)

9:30 AM - 11:30 AM

〇Takuya Akano¹, Mutsunori Uenuma¹, Yuta Tominaga¹, Yasuaki Ishikawa¹, Yukiharu Uraoka¹ (1.NAIST)

Keywords:power device