[16a-P7-1~13] ナノバイオテクノロジーとバイオセンシングに関するジョイントシンポジウム

▲ [16a-P7-3] Au core-TiO₂ shell nanoparticles produced by RT atomic layer deposition and their applications to electron channels

〇廣瀬 文彦¹、菊地 航¹、鹿又 健作¹、三浦 正範¹、有馬 アハマド¹、久保田 繁¹ (1.山形大理工)

キーワード：nanoparticle, TiO2, Atomic Layer Deposition

Core-shell nanoparticles consist of core materials coated with different kinds of films, where new functional material properties are expected by the combination of core and shell materials. In our laboratory, we have been developing the Au-core-oxide-semiconductor shell particles which must be used for the electron channel material. By using the metal core, we can form the particle chain between two adjacent electrodes by using an electrostatic force where the shell material works as a semiconductor channel. We also expect the nanoparticle chain can be formed at a two-dimensional space in a lipid bilayer that could be used for the bio sensors and field effect sensors. We report on the room temperature atomic layer deposition producing the core-shell particles and the related experiments in the presentation.