2:15 PM - 2:30 PM
▲ [16p-304-4] Extremely high growth rate MOVPE: GaAs growth for low-cost PV application
Keywords:MOVPE, high growth rate, solar cell
Ultra-fast GaAs growth by MOVPE has been demonstrated with a GR upon 90 µm/h. The GaAs GR linearly depended on the TMGa flow, which the GR saturation was barely observed. GaAs p-n solar cells grown with GR of 19 µm/h exhibited good performance and excellent uniformity. To utilize an extremely fast GR, further investigations are required in order to improve quality of epitaxial layers.