[16p-315-1~11] Recent GFIS microscopy technology and its future prospects for R & D of materials and devices

▲ [16p-315-4] A study on fabrication characteristics of gold films using focused helium ion beam

〇Etsuo Maeda¹, Tomohiko Iijima², Shinji Migita², Shinich Ogawa², Reo Kometani¹ (1.Univ. of Tokyo, 2.AIST)

Keywords:helium ion microscope, ion beam, nanoscale patterning

The nano-gap fabrication techniques with gold structures have been investigated to realize the high efficient sensing devices. In our work, the helium ion microscope (HIM, Carl Zeiss ORION PLUS at AIST SCR station) was carried out to realize nanoscale patterning. For the purpose of detailed study for fabrication characteristics of gold films using HIM, cross-section of etched trench were evaluated by Z-contrast TEM images.