[16p-315-1~11] Recent GFIS microscopy technology and its future prospects for R & D of materials and devices

▲ [16p-315-8] Nanofabrication of superconducting devices with focused helium ion irradiation

〇Shane Cybart¹ (1.UC Riverside)

Keywords:Superconductor, Helium ion microscope, nanofabrication

The 1987 discovery of high-T_C superconductivity in ceramic materials at temperatures around 90 K set off a frenzy of research in the development of high-T_C electronics, motivated by the prospects of electronics operating in liquid nitrogen at 77K opposed to 4 K liquid helium. Unfortunately, it was soon discovered that these new materials were much more difficult to process than conventional metal superconductors. High-T_C materials are very anisotropic and the superconducting properties vary along the different crystallographic directions which complicates manufacturing of the basic building blocks of superconducting electronics: Josephson junctions. Furthermore, the length scale of superconductivity in high-T_C ceramics is very short compared to low-T_C metals. Recently, my group has demonstrated a new scalable nanomanufacturing method of high-T_C electronics using the finely focused beam from a helium ion microscope, which has the potential to deliver large numbers of high-quality circuits while at the same time reducing their costs by orders of magnitude. I will present some of the novel characteristics and applications of this new remarkable technology.