The 64th JSAP Spring Meeting, 2017

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6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[16p-411-1~10] 6.1 Ferroelectric thin films

6.1と13.3と13.5のコードシェアセッションあり

Thu. Mar 16, 2017 4:00 PM - 6:30 PM 411 (411)

Tomoaki Yamada(Nagoya Univ.)

6:15 PM - 6:30 PM

[16p-411-10] Fabrication and characteristics of an ultra-thin PZT MEMS mirror device

〇Toshihiro Takeshita1, Natsumi Makimoto1, Takeshi Kobayashi1 (1.AIST)

Keywords:MEMS, flexible, PZT

Flexible hybrid electronics has attracted attention in recent years. The research about ultra-thin and flexible MCUs, operational amplifiers, and some sensor devices have been conducted. However, there are few reports of ultra-thin and flexible actuator which is mounted on a flexible substrate. In this report, we mention about fabrication and characteristics of ultra-thin MEMS mirror device.