Toshihiro Takeshita

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 4:00 PM - 6:30 PM 411 (411)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[16p-411-1~10] 6.1 Ferroelectric thin films

6.1と13.3と13.5のコードシェアセッションあり

6:15 PM - 6:30 PM

[16p-411-10] Fabrication and characteristics of an ultra-thin PZT MEMS mirror device

〇Toshihiro Takeshita¹, Natsumi Makimoto¹, Takeshi Kobayashi¹ (1.AIST)