[16p-411-1~10] 6.1 Ferroelectric thin films

[16p-411-10] Fabrication and characteristics of an ultra-thin PZT MEMS mirror device

〇Toshihiro Takeshita¹, Natsumi Makimoto¹, Takeshi Kobayashi¹ (1.AIST)

Keywords:MEMS, flexible, PZT

Flexible hybrid electronics has attracted attention in recent years. The research about ultra-thin and flexible MCUs, operational amplifiers, and some sensor devices have been conducted. However, there are few reports of ultra-thin and flexible actuator which is mounted on a flexible substrate. In this report, we mention about fabrication and characteristics of ultra-thin MEMS mirror device.