[16p-412-1~20] 13.5 Semiconductor devices and related technologies

[16p-412-3] Tunnel FinFET CMOS Inverter for Ultra-Low Power IoT Application

〇Yukinori Morita¹, Koichi Fukuda¹, Yongxun Liu¹, Takahiro Mori¹, Wataru Mizubayashi¹, Shin-ichi O'uchi¹, Hiroshi Fuketa¹, Shintaro Otsuka¹, Shinji Migita¹, Meishoku Masahara¹, Kazuhiko Endo¹, Hiroyuki Ota¹, Takashi Matsukawa¹ (1.AIST)

Keywords:Tunnel FET, TFET, CMOS inverter

Tunnel FET is regarded as a novel transistor for ultra-low power IoT application. We demonstrate Si tunnel FinFET CMOS inverter operations through both experimental and simulation methods.