The 64th JSAP Spring Meeting, 2017

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13 Semiconductors » 13.3 Insulator technology

[16p-413-1~11] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

Thu. Mar 16, 2017 2:00 PM - 5:00 PM 413 (413)

Toshifumi Irisawa(AIST), Shinichi Takagi(Univ.Tokyo)

2:30 PM - 2:45 PM

[16p-413-3] The effect of Post Metallization Annealing for GeO2/Ge structures using CVD method

〇Takumi Hadano1, Yoshitaka Iwazaki1, Tomo Ueno1 (1.Noukou Univ.)

Keywords:semiconductor