The 64th JSAP Spring Meeting, 2017

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

[16p-413-1~11] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

Thu. Mar 16, 2017 2:00 PM - 5:00 PM 413 (413)

Toshifumi Irisawa(AIST), Shinichi Takagi(Univ.Tokyo)

2:45 PM - 3:00 PM

[16p-413-4] Study of Thermal Oxidation Mechanism of Germanium

〇(D)Wang Xu1, Tomonori Nishimura1, Takeaki Yajima1, Akira Toriumi1 (1.Univ. of Tokyo)

Keywords:Germanium Oxidation