The 64th JSAP Spring Meeting, 2017

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13 Semiconductors » 13.3 Insulator technology

[16p-413-1~11] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

Thu. Mar 16, 2017 2:00 PM - 5:00 PM 413 (413)

Toshifumi Irisawa(AIST), Shinichi Takagi(Univ.Tokyo)

3:00 PM - 3:15 PM

▼ [16p-413-5] Relationship between initial properties and reliability of Ge gate stacks

〇(D)Xiaoyu Tang1,2, Akira Toriumi1 (1.Univ. of Tokyo, 2.Nanjing Univ.)

Keywords:Germanium, Oxide reliability