The 64th JSAP Spring Meeting, 2017

Presentation information

Print

Oral presentation

13 Semiconductors » 13.3 Insulator technology

[16p-413-1~11] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

Thu. Mar 16, 2017 2:00 PM - 5:00 PM 413 (413)

Toshifumi Irisawa(AIST), Shinichi Takagi(Univ.Tokyo)

4:15 PM - 4:30 PM

[16p-413-9] Characterization of defect property in MOCVD-grown Ge1-xSnx gate stuck structures

〇Kaneda Yuichi1, Shinichi Ike1,2, Masayuki Kanematsu1, Mitsuo Sakashita1, Wakana Takeuchi1, Osamu Nakatsuka1, Shigeaki Zaima1,3 (1.Grad. Sch. of Eng., Nagoya Univ, 2.JSPS Research Fellow, 3.IMaSS, Nagoya Univ)

Keywords:semiconductor, gate stuck, GeSn channel