The 64th JSAP Spring Meeting, 2017

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3 Optics and Photonics » 3.8 Optical measurement, instrumentation, and sensor

[16p-418-1~17] 3.8 Optical measurement, instrumentation, and sensor

Thu. Mar 16, 2017 1:15 PM - 5:45 PM 418 (418)

Tatsutoshi Shioda(Saitama Univ.), Masami Yasuda(AIST)

5:30 PM - 5:45 PM

[16p-418-17] A Study on SOI Photodiode with Surface Plasmon Antenna Enabling Refractive Index Measurement by Simpler Optical Irrdiation System with Normal Incidence

〇Hiroaki Satoh1, Hiroshi Inokawa1 (1.Shizuoka Univ.)

Keywords:SOI photodiode, surface plasmon antenna, refractive index measurement

The authors have proposed a novel refractive index measurement method around surface plasmon (SP) antenna on silicon-on-insulator (SOI) photodiode. However, the oblique incident light to the photodiode is needed for the refractive index measurement. In this report, we study the structure of SOI photodiode with SP antenna which enables the refractive index measurement by simpler optical irradiation system with normal incidence by electromagnetic simulations using finite difference time domain (FDTD) method.