The 64th JSAP Spring Meeting, 2017

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CS Code-sharing session » CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[16p-424-1~8] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

Thu. Mar 16, 2017 2:00 PM - 4:00 PM 424 (424)

Noriaki Toyoda(Univ. of Hyogo)

2:00 PM - 2:15 PM

[16p-424-1] Lever structure fabrication by double-angled etching with ClF3 neutral cluster

〇Toshio Seki1, Tadashi Syojo2, Kunihiko Koike2, Hiroki Yamamoto3, Takahiro Kozawa3, Takaaki Aoki1, Jiro Matsuo1 (1.Kyoto Univ., 2.Iwatani Corp., 3.ISIR Osaka Univ.)

Keywords:cluster, neutral beam, etching