Toshio Seki

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 2:00 PM - 4:00 PM 424 (424)

Oral presentation
| CS Code-sharing session
| CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[16p-424-1~8] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

2:00 PM - 2:15 PM

[16p-424-1] Lever structure fabrication by double-angled etching with ClF₃ neutral cluster

〇Toshio Seki¹, Tadashi Syojo², Kunihiko Koike², Hiroki Yamamoto³, Takahiro Kozawa³, Takaaki Aoki¹, Jiro Matsuo¹ (1.Kyoto Univ., 2.Iwatani Corp., 3.ISIR Osaka Univ.)