The 64th JSAP Spring Meeting, 2017

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CS Code-sharing session » CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[16p-424-1~8] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

Thu. Mar 16, 2017 2:00 PM - 4:00 PM 424 (424)

Noriaki Toyoda(Univ. of Hyogo)

3:30 PM - 3:45 PM

[16p-424-7] Improvement of a detection limit using tandem-SIMS instrument

〇Kanji Suzuki1, Toshio Seki1, Takaaki Aoki1, Jiro Matsuo1 (1.Kyoto Univ.)

Keywords:secondary ion mass spectrometry, tandem mass spectrometry, cluster ion beam