[16p-512-1~10] Imaging of interfaces in thin films and multilayers

[16p-512-10] Methodological assessment of XANAM for efficient operation

〇Shushi Suzuki¹, Shingo Mukai², Wang-Jae Chun³, Masaharu Nomura⁴, Kiyotaka Asakura² (1.Nagoya Univ., 2.Hokkaido Univ., 3.ICU, 4.KEK-PF)

Keywords:Synchrotron X-ray, NC-AFM, elemental analysis

For elemental analysis on nano-structures on surfaces/interfaces, we have engaged development of X-ray aided noncontact atomic force microscopy (XANAM). To improve measurement efficiency and targeting various samples, more simple operational ways should be proposed for XANAM from the viewpoints of temporal and technical aspects. Here, using Ni nanoparticles deposited on HOPG sample, a methodological assessment was presented for improving the measurement efficiency.