[16p-512-1~10] Imaging of interfaces in thin films and multilayers

[16p-512-3] Fixing Methods of Thin Plastic Films for X-ray Reflectivity Measurement of Thin Films Formed on Flexible Substrates

Kodai Tokunaga², Hiroyuki Uebayashi², Takayuki Tajiri¹, Makoto Sato², 〇Atsushi Kohno¹ (1.Fukuoka Univ., 2.Toray Industries Inc.)

Keywords:thin film, flexible substrates, x-ray reflectivity method

We have worked for the development of accurate evaluation methods for the film structures, which are film thickness, density, and roughness of surface and interface, of thin films formed on flexible substrates such as polyethylene terephthalate (PET).
In this meeting we introduce our new simple method of fixing the flexible substrates on the sample stage for X-ray reflectivity measurement with aim to analyze the film structure with high accuracy on repetition. And also we report the results of X-ray reflectivity analysis, which include the accuracy and reproducibility of repetition of measurement and analysis, in the case of silicon oxide thin films formed on PET substrates as a typical case.